Browse Prior Art Database

Environmental Dimensional Monitoring

IP.com Disclosure Number: IPCOM000092484D
Original Publication Date: 1966-Nov-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Grace, FE: AUTHOR [+5]

Abstract

This testing arrangement measures the change in length of a flat substrate, such as a memory plane, under changing environments of temperature and humidity. A metallic fixture is provided for mounting substrate 11 and includes base 13 and worktable 15 mounted on base 13.

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Environmental Dimensional Monitoring

This testing arrangement measures the change in length of a flat substrate, such as a memory plane, under changing environments of temperature and humidity. A metallic fixture is provided for mounting substrate 11 and includes base 13 and worktable 15 mounted on base 13.

Substrate 11 which is to be monitored for changes is mounted flat on table
15. The left end of substrate 11 abuts an upwardly-extended reference block 17. The right end of substrate 11 abuts sensor 21 of linear transducer 23. The latter is mounted in fixed upright support 25. Quartz rod 27 is attached to support 25 and extends under table 15 to abut block 17 which is urged to the right by spring
29. Rod 27, or a plurality of them, maintains an essentially constant separation between block 17 and support 25 as the metal elements change significantly with temperature. Thus, the changes in length of substrate 11 are translated to a signal by transducer 23.

The fixture with a mounted substrate 11 is placed in a chamber in which temperature and humidity are varied. By suitable external instrumentation and recording, the change of length of the substrate 11 is observed and related to the desired environmental conditions. In this manner, the stability of substrate 11 can be dimensionally monitored while varying both temperature and humidity.

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