Browse Prior Art Database

Fluorine Containing Thin Films

IP.com Disclosure Number: IPCOM000092600D
Original Publication Date: 1966-Dec-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Mullin, BM: AUTHOR

Abstract

Magnetic thin films are useful as storage and switching devices in electronic equipment.

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Fluorine Containing Thin Films

Magnetic thin films are useful as storage and switching devices in electronic equipment.

Magnetic thin films are produced at elevated temperatures in a nonreactive atmosphere by cathode sputtering. While the films are still at elevated temperatures, fluorine gas is introduced into the atmosphere. Simultaneously with the addition of the fluorine, a positive bias is applied to the substrate in a conventional manner. This results in the formation of a fluorine containing compound. For example, if the sputtered material is nickel-iron-manganese, a fluorine containing nickel-iron-manganese ferrite layer is formed at the surface of the film.

Ferrites containing fluorine have improved magnetic characteristics and are useful as storage devices.

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