Browse Prior Art Database

Article Handling System

IP.com Disclosure Number: IPCOM000092642D
Original Publication Date: 1966-Dec-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Metreaud, CG: AUTHOR

Abstract

This apparatus is for loading and unloading articles, especially semiconductor wafers 1, drawing A, into a rotary carrier 2, drawing B, by utilizing air slide 3. Carrier 2 is a detachable, slotted circular drum which is indexed so as to permit wafers 1 to be introduced into the slots of carrier 2.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Article Handling System

This apparatus is for loading and unloading articles, especially semiconductor wafers 1, drawing A, into a rotary carrier 2, drawing B, by utilizing air slide 3. Carrier 2 is a detachable, slotted circular drum which is indexed so as to permit wafers 1 to be introduced into the slots of carrier 2.

Slide 3 comprises plenum chamber 5, inlet hose 6 which admits low pressure air into chamber 5, and top surface 7. The latter is preferably made of a sintered porous stainless steel plate through which air escapes to support wafers 1. Contact between wafers 1 and surface 7 is thus eliminated. Pivot post 8 allows the index mechanism to be pivoted into position in order to permit carrier 2 to be properly positioned.

If desired. slide 3 can be adapted to be tilted by pivot arrangement 9. Such action permits wafers 1 to be transferred away from the carrier 2, when slide 3 is in the upper phantom line position, onto slide 3 after ejection from the drum by ejecting mechanism not shown. The middle phantom line position is when wafers are in a standby position.

The entire apparatus can be placed in an oven if a heat treatment type semiconductor fabrication process is needed.

A vacuum hold system, not shown, can also be used inside of and in conjunction with the slide 3 thus stopping and holding wafers 1 at desired points.

1

Page 2 of 2

2

[This page contains 4 pictures or other non-text objects]