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Browse Prior Art Database

Microcircuit Probe

IP.com Disclosure Number: IPCOM000092666D
Original Publication Date: 1967-Feb-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 88K

Publishing Venue

IBM

Related People

Brunner, RH: AUTHOR [+3]

Abstract

The multicontact probe system shown is made from a beryllium-copper-molybdenum copper-molybdenum conductive foil whose small dimensions, 3/8 x 3/8 x 0.002 inches, provides it with high-frequency pulse testing capabilities. This probe measures microminiature planar components. This is effected by probing into multiple arrays of microscopically divided terminals of integrated circuits formed on chips of semiconductor wafer 15.

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Microcircuit Probe

The multicontact probe system shown is made from a beryllium-copper- molybdenum copper-molybdenum conductive foil whose small dimensions, 3/8 x 3/8 x 0.002 inches, provides it with high-frequency pulse testing capabilities. This probe measures microminiature planar components. This is effected by probing into multiple arrays of microscopically divided terminals of integrated circuits formed on chips of semiconductor wafer 15.

The probe is formed by etching the uncoated sections 12, drawing A, of a conductive foil by conventional photolithographic techniques to provide a preform of the desired probe configuration 1.

The latter radiates inwardly from an integral peripheral frame 2 connected to and supporting each of the probes 3. The probe configuration defined by a developed photoresist pattern 11 is shown in drawing A. The free distal end portions 4 are then formed to provide contact plane 5 displaced from plane 6 of the remaining portions of probes 3.

The shaped preform is then bonded, drawing B, to a nonconducting substrate 9, e.g., a glass filled phenolic, and the supporting frame 2 and connecting portions 7 are removed by suitable trimming, as in drawing C, to isolate the probes. Substrate 9 is provided with a 48 x 48 mils viewing hole 8. Sixteen probes 3 are mounted on substrates with their shaped end portions 4 projecting over the hole and radiating inwardly. Also shown in drawing D are optional input/output pins 10 for facilitating conne...