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Automatic Tuning of Matching Network for RF Sputtering Apparatus

IP.com Disclosure Number: IPCOM000092679D
Original Publication Date: 1967-Feb-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Mazza, NM: AUTHOR

Abstract

This device maintains a constant adjustment of the matching network of RF sputtering apparatus. Such adjustment results in a match of the phase angle and magnitude of the combined power supply and transmission line impedance with the impedance of the load. In RF sputtering apparatus, a matching network circuit is conventionally used to adjust the combined impedance of the power supply and transmission line to match the impedance of the load. During a typical sputtering operation, the load impedance can change. The adjustment of the matching network circuit is normally done manually.

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Automatic Tuning of Matching Network for RF Sputtering Apparatus

This device maintains a constant adjustment of the matching network of RF sputtering apparatus. Such adjustment results in a match of the phase angle and magnitude of the combined power supply and transmission line impedance with the impedance of the load. In RF sputtering apparatus, a matching network circuit is conventionally used to adjust the combined impedance of the power supply and transmission line to match the impedance of the load. During a typical sputtering operation, the load impedance can change.

The adjustment of the matching network circuit is normally done manually.

In this matching network tuning device, phase detector 10 and magnitude detector 12 are associated with the transmission line supplying RF power from the power source to the anode and cathode of the sputtering apparatus not shown. Detectors 10 and 12 constantly sense the voltage-current phase angle and the impedance magnitude. Amplifiers 14 and 16 magnify the output of detectors 10 and 12 respectively. The outputs of amplifiers 14 and 16 are fed to cycler 18. The latter alternately applies the corrective responses called for by detectors 10 and 12 to driving motors 20 and 22 respectively. The latter are connected to adjusting elements 24 and 26, respectively, of the matching network circuits. The latter are adapted to compensate for impedance variations,
i. e., phase angle and impedance magnitude, sensed by detectors 10...