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EuO Film Fabrication

IP.com Disclosure Number: IPCOM000092723D
Original Publication Date: 1967-Jan-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Ahn, KY: AUTHOR [+2]

Abstract

EuO films, because of their high magneto-optical activity, are very desirable as elements in optical devices. However, when conventional vacuum deposition techniques are used, it is difficult to obtain homogeneous films. This is because evaporation rates and oxygen pressures or the residual gas contents of the vacuum system cannot be accurately controlled. Where a reactive evaporation of Eu in an oxygen atmosphere is tried, it is difficult to control the reaction so as to obtain an EuO film that is stoichiometric.

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EuO Film Fabrication

EuO films, because of their high magneto-optical activity, are very desirable as elements in optical devices. However, when conventional vacuum deposition techniques are used, it is difficult to obtain homogeneous films. This is because evaporation rates and oxygen pressures or the residual gas contents of the vacuum system cannot be accurately controlled. Where a reactive evaporation of Eu in an oxygen atmosphere is tried, it is difficult to control the reaction so as to obtain an EuO film that is stoichiometric.

To avoid these difficulties, an EuO film is produced by employing two separate sources. A first crucible contains the metallic Eu and a second crucible contains the compound Eu(2)O(3). A shutter is placed over the Eu(2)O(3) while Eu is deposited onto a substrate. After the deposition of Eu, the shutter is removed from the heated source of Eu(2)O(3). The simultaneous presence of Eu vapor and Eu(2)O(3) vapor on the substrate produces the volatile chemical reaction Eu + Eu(2)O(3) approaches 3 EuO. Since Eu is deposited so as to be in excess of what is required to produce the chemical reaction Eu + Eu(2)O(3) approaches 3 EuO, the heat produced by the reaction vaporizes the excess Eu metal, producing an EuO film having good stoichiometry.

EuO can also be produced by depositing alternate layers of Eu and Eu(2)O(3) on a substrate that is maintained at 350 degrees C or above. Eu is deposited in excess of what is needed in the above noted re...