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Gettering by Laser Induced Evaporation

IP.com Disclosure Number: IPCOM000092883D
Original Publication Date: 1967-Mar-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Winters, HF: AUTHOR

Abstract

Evaporation of getter materials can be accomplished by the heating of a small portion of such materials with a beam from laser 1. The beam is introduced into the vacuum system, such as electron tube 2, through a transparent wall or window. In a typical application, a non Q-spoiled ruby laser pulse is fired into a .015" piece of titanium contained in a 12 liter volume. The partial pressure of CO is about 1 x 10/-5/ torr. before the laser shot and less than 1 x 10/-7/ after the shot. Selection of the appropriate getter material 3 or 4 allows selective gettering. For example, a nickel getter can be used to adsorb CO in the presence of nitrogen with no adsorption of the nitrogen. The gettering operation can be repeated at intervals if the system requires it.

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Gettering by Laser Induced Evaporation

Evaporation of getter materials can be accomplished by the heating of a small portion of such materials with a beam from laser 1. The beam is introduced into the vacuum system, such as electron tube 2, through a transparent wall or window. In a typical application, a non Q-spoiled ruby laser pulse is fired into a .015" piece of titanium contained in a 12 liter volume. The partial pressure of CO is about 1 x 10/-5/ torr. before the laser shot and less than 1 x 10/-7/ after the shot. Selection of the appropriate getter material 3 or 4 allows selective gettering. For example, a nickel getter can be used to adsorb CO in the presence of nitrogen with no adsorption of the nitrogen. The gettering operation can be repeated at intervals if the system requires it.

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