Browse Prior Art Database

Thick Film Resonant Device

IP.com Disclosure Number: IPCOM000093055D
Original Publication Date: 1967-Apr-01
Included in the Prior Art Database: 2005-Mar-05
Document File: 2 page(s) / 26K

Publishing Venue

IBM

Related People

Hayden, HP: AUTHOR

Abstract

Cantilever 1, preferably composed of a metal such as steel and having a high-resistivity coating composed of a material such as silicon dioxide or silicon nitride, extends from pedestal or support 2. An area of polycrystalline semiconducting material 3 is then deposited on cantilever 1. Conductors 4 and 5 are deposited at opposite ends of material 3 to form a resistive strain gauge. Current is supplied to the gauge which, in turn, causes the vibration of cantilever 1 at its resonant frequency. Since the device operates at a single frequency, the nonlinearities of a polycrystalline strain gauge are not important to its operation.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Thick Film Resonant Device

Cantilever 1, preferably composed of a metal such as steel and having a high-resistivity coating composed of a material such as silicon dioxide or silicon nitride, extends from pedestal or support 2. An area of polycrystalline semiconducting material 3 is then deposited on cantilever 1. Conductors 4 and 5 are deposited at opposite ends of material 3 to form a resistive strain gauge. Current is supplied to the gauge which, in turn, causes the vibration of cantilever 1 at its resonant frequency. Since the device operates at a single frequency, the nonlinearities of a polycrystalline strain gauge are not important to its operation. Conductors 6 and 7 extending from the guage to an accessible point on cantilever 1 and active devices, not shown, used for the associated circuit, can be attached to the coating on cantilever 1 using conventional thick-film techniques.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]