Browse Prior Art Database

Test Site Technology in Integrated Circuits

IP.com Disclosure Number: IPCOM000093245D
Original Publication Date: 1967-Jul-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Blake, BE: AUTHOR [+3]

Abstract

The interconnection test site is a special test device which permits sensitive localized, electrical measurements to be made of interconnections, conductors and insulators in integrated circuits. The test chips for the special test devices are produced on the same wafer as functional integrated circuits. Hence, they are representative of the normal product.

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Test Site Technology in Integrated Circuits

The interconnection test site is a special test device which permits sensitive localized, electrical measurements to be made of interconnections, conductors and insulators in integrated circuits. The test chips for the special test devices are produced on the same wafer as functional integrated circuits. Hence, they are representative of the normal product.

The interconnection test site is used during device fabrication for in-process measurements to optimize device process variables and to increase integrated circuit chip yields. It is used during chip-to-module joining as a tool to optimize the chip joining process. It is used after module mounting for further device characterization studies and for device reliability projections.

This test site module is used as a test vehicle to provide a quantitative measurement of interconnection, conductor and insulator degradation under applied stresses. This makes possible projections of integrated circuit life under machine conditions and correlations of device performance and degradation mechanisms to actual in-process variables.

In the interconnection test site, there is the localization and isolation of resistance measurements to specific interconnections, conductors and insulators. There is also the unique technique of building into the interconnection test site as much of the measuring equipment and circuitry as possible. In this particular case, the measuring circuit eli...