Browse Prior Art Database

Planar Schottky Barrier Field Effect Transistor

IP.com Disclosure Number: IPCOM000093342D
Original Publication Date: 1967-Aug-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 25K

Publishing Venue

IBM

Related People

von Muench, W: AUTHOR [+2]

Abstract

A mesa field effect transistor is made by arranging an N-type channel layer 1 on a P-type or semi-insulating substrate. Channel 1 is in ohmic contact with source electrode 2 and drain electrode 3. Gate electrode 4 provides a Schottky barrier contact with channel 1. To assure that the width of channel 1 is fully covered by gate 4, lateral boundary regions 5 and 6 of P-type material are provided which are overlapped by electrode 4. Regions 5 and 6 also facilitate manufacture as mask alignment and etching operations become less critical. For integrated circuitry application, regions 5 and 6 are extended, as indicated by dashed areas 7 and 8, to provide complete isolation of the device from other devices on the same substrate.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Planar Schottky Barrier Field Effect Transistor

A mesa field effect transistor is made by arranging an N-type channel layer 1 on a P-type or semi-insulating substrate. Channel 1 is in ohmic contact with source electrode 2 and drain electrode 3. Gate electrode 4 provides a Schottky barrier contact with channel 1. To assure that the width of channel 1 is fully covered by gate 4, lateral boundary regions 5 and 6 of P-type material are provided which are overlapped by electrode 4. Regions 5 and 6 also facilitate manufacture as mask alignment and etching operations become less critical. For integrated circuitry application, regions 5 and 6 are extended, as indicated by dashed areas 7 and 8, to provide complete isolation of the device from other devices on the same substrate.

1

Page 2 of 2

2

[This page contains 1 picture or other non-text object]