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Mechanism for an X Y Table

IP.com Disclosure Number: IPCOM000093521D
Original Publication Date: 1967-Oct-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Wells, OC: AUTHOR

Abstract

The mechanism effects rectilinear motion of an X-Y table. It is useful in the fabrication of integrated circuit wafers in which driving forces for effecting such motion are applied in a same direction.

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Mechanism for an X Y Table

The mechanism effects rectilinear motion of an X-Y table. It is useful in the fabrication of integrated circuit wafers in which driving forces for effecting such motion are applied in a same direction.

X-Y table 1 is supported for rectilinear movement, for example, on TEFLON* pads, over base block 3. The integrated circuit wafer, not shown, is fixedly positioned on the upper surface of table 1. (X+Y) and (X-Y) linear slide members 5 and 7 are mounted in parallel fashion in base block 3. Threaded drive shafts 9 and 11 engage members 5 and 7, respectively, such that rotation of each drive shaft displaces the *Trademark of E. I. Du Pont de Nemours and Co. corresponding member in a horizontal direction. Member 5 includes a pair of orthogonal extensions 13 supporting ball bearings 15, or linear slides, which contact the 45 degree-beveled edges 17 of corresponding guide slots cut into table 1. Member 7 includes a single orthogonal extension 19 supporting ball bearing 21 which contacts the 135 degrees-beveled edge 23 of a guide slot cut into table 1.

Contact between ball-bearings 15 and 21 with the beveled edges 17 and 23, respectively, is maintained by return spring 25. The latter is connected between member 7 and arm 27 which is pivotly mounted on member 5. Arm 27 supports ball bearing 29 which contacts the edge 31 of table 1. Spring 25 remains at an essentially constant length during movement of table 1 so that work done against spring 25 i...