Browse Prior Art Database

X Y Alignment Tables with Stationary Drives

IP.com Disclosure Number: IPCOM000093617D
Original Publication Date: 1967-Nov-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Bresg, V: AUTHOR [+2]

Abstract

X-Y alignment apparatus is provided in which the two motors and shafts which supply the respective X and Y linear movement are stationary. Such a stationary disposition of the motors and shafts permits an arrangement by which the motors on the outside of a vacuum chamber drive the shafts which extend into the vacuum chamber to align X-Y tables within the vacuum chamber.

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X Y Alignment Tables with Stationary Drives

X-Y alignment apparatus is provided in which the two motors and shafts which supply the respective X and Y linear movement are stationary. Such a stationary disposition of the motors and shafts permits an arrangement by which the motors on the outside of a vacuum chamber drive the shafts which extend into the vacuum chamber to align X-Y tables within the vacuum chamber.

A workpiece to be positioned into a preselected X-Y orientation is mounted on the surface of the X table. The X and Y tables are then respectively driven by screwdrive shafts which are rotated by motors, not shown, which can be stepping motors. The Y shaft which passes through wall 10 drives the Y table via post 11 on the Y table which has a screw-threaded bore receiving the Y shaft. The Y table slides along rails 12 and 13 carrying with it the X table. The latter is affixed to the Y table through rails 14 and 15 supported on stanchions 17 and 18 which are affixed to the Y table. During the movement of the Y and X tables in the Y direction, rails 19 and 20, which are suspended from end attached to the X table by screws 21, slide through follower 22 mounted on the X screwdrive shaft.

The X screwdrive shaft is coupled to the X table by follower 22 having a bore with a screw thread for receiving the X screwdrive shaft. Thus, motion in the Y direction is not imparted to the X shaft. This is because follower 22 remains in slidable engagement with rails 19 and...