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High Speed Multiprobe Semiconductor Test Assembly

IP.com Disclosure Number: IPCOM000093722D
Original Publication Date: 1966-Jan-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

Beauregard, FP: AUTHOR [+3]

Abstract

This probe system measures electrical parameters of semiconductor material. Four tungsten wire probes 1, each supported by a stainless steel tube 2, are provided for contacting the semiconductor. Guide tube assembly 3 is provided such that the contact end 4 of each probe is guided onto the semiconductor under test by its individual glass guide tube 5. Each tube 5 is cemented into a support tube 6 carried on transparent disc 7. Such arrangement permits examination of the semiconductor contact area to be made via microscope objective 8 during test. The remote end of each probe terminates in its individual screw fitting 9 for setting the axial position of the contact end. All the structure is mounted on iron plunger 10 which is supported by diaphragms 11. Plunger 10 is actuated by solenoid 12 to contact the semiconductor.

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High Speed Multiprobe Semiconductor Test Assembly

This probe system measures electrical parameters of semiconductor material. Four tungsten wire probes 1, each supported by a stainless steel tube 2, are provided for contacting the semiconductor. Guide tube assembly 3 is provided such that the contact end 4 of each probe is guided onto the semiconductor under test by its individual glass guide tube 5. Each tube 5 is cemented into a support tube 6 carried on transparent disc 7. Such arrangement permits examination of the semiconductor contact area to be made via microscope objective 8 during test. The remote end of each probe terminates in its individual screw fitting 9 for setting the axial position of the contact end. All the structure is mounted on iron plunger 10 which is supported by diaphragms
11. Plunger 10 is actuated by solenoid 12 to contact the semiconductor. Lucite structure 13 guides light from an external illuminator to the probe area.

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