Browse Prior Art Database

Continuously Operating Crystal Puller

IP.com Disclosure Number: IPCOM000094015D
Original Publication Date: 1966-Apr-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Rinkleib, HO: AUTHOR [+3]

Abstract

This semiconductor crystal puller permits substantially continuous pulling of monocrystalline semiconductor crystals. This is realized without the necessity of shutdown of the furnace for recharging the crucible and removing the grown crystal.

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Continuously Operating Crystal Puller

This semiconductor crystal puller permits substantially continuous pulling of monocrystalline semiconductor crystals. This is realized without the necessity of shutdown of the furnace for recharging the crucible and removing the grown crystal.

Furnace 1 contains quartz crucible 2 which contains a suitable melt. A cover designated generally as 3 is fitted on furnace 1. Upper plate 4 of cover 3 is rotatably mounted on base plate 5, rotating about axis 6. After a crystal 10 is grown and raised to the position shown, plate 4 is rotated. This places cylinder 7 over furnace 1 and cylinder 8 is rotated to the standby position. Silicon charge 9 is deposited in furnace 1 and a second crystal pulling operation can now be performed. With cylinder 8 in the standby position, grown crystal 10 is removed for further processing in the fabrication of semiconductor wafers.

In this manner, the furnace can be operated continuously without cooling, thus substantially increasing production.

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