Browse Prior Art Database

Wafer Handling Apparatus

IP.com Disclosure Number: IPCOM000094157D
Original Publication Date: 1966-Jun-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Davis, TE: AUTHOR

Abstract

This apparatus automatically positions wafers and rejects broken or reversed wafers.

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Wafer Handling Apparatus

This apparatus automatically positions wafers and rejects broken or reversed wafers.

With reference to drawing A, wafers 1 are dropped onto belt 2 which is preferably inclined 15 degrees. Wafers 1 lean against the back rest 3 which is preferably at a 10 degree angle as in drawing B and roll down the inclined belt 2 to the stop 4. Belt 2 continues to rotate wafer 1 at the stop position until wafer notch 5 engages pin 6. Wafer 1 stops rotating and is now in position to be picked up.

When a broken wafer 7 drops on belt 2, the flat side of wafer 1 stops the rolling action. Belt 2 carries wafer 7 in the direction of arrow 8 up and off the other end.

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