Browse Prior Art Database

Quartzware for Semiconductor Manufacturing Applications

IP.com Disclosure Number: IPCOM000094166D
Original Publication Date: 1966-Jun-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Benjamin, CE: AUTHOR

Abstract

This arrangement of quartz parts is for oxidation and diffusion operations in semiconductor manufacturing applications. Single-ended tubes, drawing A, are inserted into a furnace where either the diffusion or oxidation operation or both are carried out.

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Quartzware for Semiconductor Manufacturing Applications

This arrangement of quartz parts is for oxidation and diffusion operations in semiconductor manufacturing applications. Single-ended tubes, drawing A, are inserted into a furnace where either the diffusion or oxidation operation or both are carried out.

Furnace tube 1 has a large ground taper female joint 2 at one end. At the other end it is sealed except for gas inlet tube 3. This continues back around the outside of the tube, at the bottom or side, to the same end as the large joint. Here it terminates in an appropriate fitting, e.g., ground ball joint 4. Inlet tube 3 is level or has an uphill slope for its entire length.

An end cap-transfer carrier 2a, drawing B, is constructed from the same square or rectangular stock as tube 1 and terminates in a male ground joint which mates with tube 1. Also on carrier 2a is outlet port 5 and a push rod receptacle with an internal surface which accepts the stresses when push rod 6 is being removed from boat 7 as in drawing C.

In use, wafers 8 are loaded onto boat 7 in a filtered air chamber distant from the furnace. Boat 7 is loaded into closure 2a and closures are placed over all three openings. Sealed carrier 2a is then taken to the furnace, where the large end closures are removed from carrier 2a and tube 1, and the two are fitted together. Ideally, a small laminar-flow filtered air blower over the end of tube 1 prevents dust from entering the system during this st...