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Steam Generator for Thermal Oxidation of Semiconductors

IP.com Disclosure Number: IPCOM000094179D
Original Publication Date: 1966-Jun-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Benjamin, CE: AUTHOR

Abstract

This system comprises primarily a modified distillation flask l and an immersion type heater which consists of heater coil 2 encapsulated in quartz cylinder 2A. An adapter between flask 1 and heater 2 consists of a standard PYREX* ball joint 3 and a TEFLON ** coupling 4. Thus adjustment of the location of heater 2 in flask 1 is permitted. For filling, a direct inlet line can be connected to a deionized water supply, terminating in an outlet underneath the water level. *Trademark of Corning Glass Works. **Trademark of E. I. du Pont de Nemours and Co.

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Steam Generator for Thermal Oxidation of Semiconductors

This system comprises primarily a modified distillation flask l and an immersion type heater which consists of heater coil 2 encapsulated in quartz cylinder 2A. An adapter between flask 1 and heater 2 consists of a standard PYREX* ball joint 3 and a TEFLON ** coupling 4. Thus adjustment of the location of heater 2 in flask 1 is permitted. For filling, a direct inlet line can be connected to a deionized water supply, terminating in an outlet underneath the water level. *Trademark of Corning Glass Works. **Trademark of E. I. du Pont de Nemours and Co.

Bumping, which results in an uneven flow of steam and which can also cause damage to the semiconductor, is completely eliminated in this system. The translucent quartz heater surface provides a large number of nucleation points for boiling. Since the water away from heater 2 is below the boiling point, bubbles 5 formed at heater 2 become smaller as they move upwardly through the water. The large number of small bubbles thus formed results in a smooth steam outflow through outlet 6 and into the furnace where the semiconductor wafers are located. Safety valve 7 is provided to prevent undesired steam build-up.

The flask is totally exposed, so that it can be inspected during both filling and operation. The use of a quartz heater, which is essentially insoluble in boiling water, reduces contamination.

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