Browse Prior Art Database

Printed Circuit Generator

IP.com Disclosure Number: IPCOM000094212D
Original Publication Date: 1966-Jul-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Herring, FA: AUTHOR [+8]

Abstract

This apparatus generates artwork useful in photolithographic processes for fabricating integrated circuit devices. The apparatus can be program-controlled through magnetic tape. The apparatus is easily and accurately controlled.

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Printed Circuit Generator

This apparatus generates artwork useful in photolithographic processes for fabricating integrated circuit devices. The apparatus can be program-controlled through magnetic tape. The apparatus is easily and accurately controlled.

Light source 20 generates a well-collimated beam of light. The beam can be generated from a conventional light source in combination with a collimating lens, not shown, or it can be a continuous gas laser. The beam is directed towards right-angle prism 22. The latter is fixed on carriage 24 that travels along rails 26. Carriage 24 moves along an X coordinate which is parallel to the axis of the collimated beam. Prism 22 redirects the collimated beam along carriage 24 to prism 28, also mounted on the carriage. Prism 28 is adapted to slide along carriage 24 or in the Y coordinate and, in turn, redirects the beam perpendicular to both the X and Y coordinates. Prisms 22 and 28 are also adapted to rotate about selected axes.

Prism 22 rotates about an axis perpendicular to both the X and Y coordinates. Prism 28 rotates about an axis parallel to the X coordinate. The rotation is accomplished by cams not shown. The cam for prism 22 is fixed on the base of the apparatus. The active portion of the cam is determined by the X position of carriage 24. The cam for the prism 28 is also fixed on carriage 24. The active position of the cam is determined by the Y position of prism 28 along carriage 24. The profiles of the cams and...