Browse Prior Art Database

Wafer Holding Dome for Sputtering and Evaporation

IP.com Disclosure Number: IPCOM000094369D
Original Publication Date: 1966-Oct-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 66K

Publishing Venue

IBM

Related People

Kurtz, JA: AUTHOR

Abstract

The wafer holding device is fabricated by forming and joining wires into a substantially dome-shaped configuration. There are four circular tiers T that are thus formed as in A and B for maintaining wafers at a fixed distance from an evaporation source. Wafers W are placed on wire rings 1 which are fixed to large rings 2. Wafers W are retained in position by U-shaped wires 3. The advantage of this basket dome holder lies in the fact that batch evaporation of a large number of wafers can be simultaneously performed. Such can occur in conjunction with a uniform sputter etching operation, if desired.

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Wafer Holding Dome for Sputtering and Evaporation

The wafer holding device is fabricated by forming and joining wires into a substantially dome-shaped configuration. There are four circular tiers T that are thus formed as in A and B for maintaining wafers at a fixed distance from an evaporation source. Wafers W are placed on wire rings 1 which are fixed to large rings 2. Wafers W are retained in position by U-shaped wires 3. The advantage of this basket dome holder lies in the fact that batch evaporation of a large number of wafers can be simultaneously performed. Such can occur in conjunction with a uniform sputter etching operation, if desired.

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