Browse Prior Art Database

Pressurized Portable Container for Rotary Carriers

IP.com Disclosure Number: IPCOM000094397D
Original Publication Date: 1966-Oct-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

Metreaud, CG: AUTHOR [+2]

Abstract

This assembly is for transporting a plurality of rotary semiconductor wafer containing carriers. Compressed nitrogen cylinder 1 having a continuous externally threaded portion T is utilized to support rotary wafer carriers 2. These are slidably mounted about cylinder 1. Removable flange 3 having an internally threaded portion 4 is provided to fasten carriers 2 into a single transportable unit. During transportation, needle valve 5 is opened to emit a controlled leakage from the gas outlet to insure positive pressure within the stack of carriers 2. Hence, this provides an arrangement where contamination of the wafers is avoided.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Pressurized Portable Container for Rotary Carriers

This assembly is for transporting a plurality of rotary semiconductor wafer containing carriers. Compressed nitrogen cylinder 1 having a continuous externally threaded portion T is utilized to support rotary wafer carriers 2. These are slidably mounted about cylinder 1. Removable flange 3 having an internally threaded portion 4 is provided to fasten carriers 2 into a single transportable unit. During transportation, needle valve 5 is opened to emit a controlled leakage from the gas outlet to insure positive pressure within the stack of carriers 2. Hence, this provides an arrangement where contamination of the wafers is avoided.

1

Page 2 of 2

2

[This page contains 3 pictures or other non-text objects]