Browse Prior Art Database

Position Detecting Apparatus

IP.com Disclosure Number: IPCOM000094410D
Original Publication Date: 1966-Oct-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Rottman, HR: AUTHOR

Abstract

This apparatus precisely detects the position of a semiconductor chip relative to a given coordinate system using the conductive lands as a reference. The apparatus also adjusts the semiconductor chip to the desired location.

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Position Detecting Apparatus

This apparatus precisely detects the position of a semiconductor chip relative to a given coordinate system using the conductive lands as a reference. The apparatus also adjusts the semiconductor chip to the desired location.

There are illumination sources positioned at an angle to the chip surface to obtain maximum contrast between the chip and its land pattern. The contrast can be increased by using monochromatic radiation or polarized light. A magnified image of the chip is projected into plane IP by microscope objective lens O and eyepiece lens E. In plane IP, the chip substrate appears black while the conductive lands appear as bright areas. Flexible coherent fiber bundles CFB transfer selected image portions of the magnified image in IP to scanning plane PL. The ends of CFB adjacent IP can be adjusted to accommodate chips of different sizes, different circuit patterns, and different locations. The ends of CFB adjacent PL are arranged to accommodate scanning device SC which is a movable unit having slits. SC can be a disk, tape, etc. Photocells PMT are arranged to view the images on PL through spaced slits in SC. The outputs PMT are fed to logic circuitry. The output of a timing device consisting of light source LS, photocell PD, and aperture A in SC, triggers the logic circuitry.

In operation, light reflected from the conductive pattern produces a signal in the PMT viewing such pattern. There is a negligible signal produced by t...