Browse Prior Art Database

Evaporation Mask Holding Fixture for Mechanized Fixture Assembly

IP.com Disclosure Number: IPCOM000094412D
Original Publication Date: 1966-Oct-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Metreaud, CG: AUTHOR [+2]

Abstract

This fixture maintains a semiconductor wafer in intimate contact with a processing mask. The fixture comprises casing assembly 1 and retainer spring 2. Casing 1 is fabricated by brazing together into a single unit cover 3, mask 4, and continuous spacer ring 5. In the loading operation, wafer 6 is slidably mounted within ring 5 of casing 1. Spring 2 is forcibly urged under light tension into cover 3 of casing 1. The biased prongs of spring 2 maintain wafer 6 in close union with mask 4.

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Evaporation Mask Holding Fixture for Mechanized Fixture Assembly

This fixture maintains a semiconductor wafer in intimate contact with a processing mask. The fixture comprises casing assembly 1 and retainer spring
2. Casing 1 is fabricated by brazing together into a single unit cover 3, mask 4, and continuous spacer ring 5. In the loading operation, wafer 6 is slidably mounted within ring 5 of casing 1. Spring 2 is forcibly urged under light tension into cover 3 of casing 1. The biased prongs of spring 2 maintain wafer 6 in close union with mask 4.

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