Browse Prior Art Database

Repairing Aluminum Integrated Circuit Wiring

IP.com Disclosure Number: IPCOM000094543D
Original Publication Date: 1965-Mar-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Hunter, LP: AUTHOR

Abstract

This technique is for repairing a short between striplines 1 and 3 defining a crossover connection 5 in an integrated wiring array.

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Repairing Aluminum Integrated Circuit Wiring

This technique is for repairing a short between striplines 1 and 3 defining a crossover connection 5 in an integrated wiring array.

Crossover connection 5 is exposed through photographic mask 7 as shown in A. Exposed portions of stripline 3 are completely anodized and rendered insulative as shown in B. For example, when stripline 3 is formed of aluminum (Al), equimolar quantities of ammonium hydrogen sulfate (NH(4)HSO(4)) and potassium hydrogen sulfate (KHSO(4)) in molten form can be used as the electrolyte.

Stripline 3 is completely anodized without penetrating insulating layer 9, since voltages to support the anodization process are applied along stripline 3. Subsequently, mask 7 is removed and conductor 11 is deposited by conventional metallization techniques over anodized portions of stripline 3 and between sections 3A and 3B to reform crossover connection 5.

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