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Browse Prior Art Database

Vacuum Evaporation Source for Electrically Conductive Materials

IP.com Disclosure Number: IPCOM000094546D
Original Publication Date: 1965-Mar-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 2 page(s) / 23K

Publishing Venue

IBM

Related People

Eschbach, RJB: AUTHOR [+4]

Abstract

With regard to microelectronic circuitry, vacuum evaporation of conductive material such as aluminum has received consideration with respect to mass production techniques. This evaporation source is for use in such large-scale production.

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Vacuum Evaporation Source for Electrically Conductive Materials

With regard to microelectronic circuitry, vacuum evaporation of conductive material such as aluminum has received consideration with respect to mass production techniques. This evaporation source is for use in such large-scale production.

A cross-section of the evaporation source is shown. The source is adapted to pass current from a low-voltage, high-current source through electro tabs A to generate heat at constrictions B and in body D of the crucible due to the high resistance of it. Evaporant material C is melted due to this localized heating and conforms to the shape of the crucible. The metal evaporant acts to shunt current away from the crucible body because of the lower resistance of the metal.

Rapid evaporation is achieved by increasing the current through the constriction and the crucible body as well as the evaporant. In this evaporation source, all the evaporant melts since, as evaporation ensues, the material thins out. It also tends to swirl and climb up the side walls of the crucible due to motion imparted to the liquid melt by the current. Side wall E of the crucible diverges outwardly and is heated by the thermoconduction to cause any overflow to remain molten and even evaporate.

This crucible provides controlled evaporation rates and reproducibility. The evaporation rate is directly proportional to the power dissipated by the crucible as its resistance is many times that of the evap...