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Electrodeposition of Aluminum on Silicon

IP.com Disclosure Number: IPCOM000095069D
Original Publication Date: 1965-Sep-01
Included in the Prior Art Database: 2005-Mar-06
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Friedman, H: AUTHOR [+2]

Abstract

This process electrodeposits aluminum on semiconductor materials including silicon. The semiconductor to be plated is immersed in a bath of Ziegler electrolyte NaZ, Z = (((C(2)H(5))(3)Al)(2)F). Mixtures of Zielger's salt and triethyla aluminum (TEA) have previously been employed as a bath for the electrodepositing of aluminum on various materials. An article entitled "Behavior of Germanium Electrodes in a Ziegler Electrolyte," by R. J. Flannery, J. E. Thomas, Jr., and D. Trivich, in the October 1963 issue of The Journal of the Electrochemical Society, pp. 1054-1058, discusses electrodeposition from NaZ on silicon and germanium but, under conditions different from those of this process.

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Electrodeposition of Aluminum on Silicon

This process electrodeposits aluminum on semiconductor materials including silicon. The semiconductor to be plated is immersed in a bath of Ziegler electrolyte NaZ, Z = (((C(2)H(5))(3)Al)(2)F). Mixtures of Zielger's salt and triethyla aluminum (TEA) have previously been employed as a bath for the electrodepositing of aluminum on various materials. An article entitled "Behavior of Germanium Electrodes in a Ziegler Electrolyte," by R. J. Flannery, J. E. Thomas, Jr., and D. Trivich, in the October 1963 issue of The Journal of the Electrochemical Society, pp. 1054-1058, discusses electrodeposition from NaZ on silicon and germanium but, under conditions different from those of this process.

In this process, compact, adherent, shiny electrodeposits are obtained on cathodes of 10 ohm-cm, N-type, intrinsic, and 10 ohm-cm P-type silicon as well as on cathodes of Ga, GaAs, Cu, and Au. Excellent deposits are obtained at temperatures in the range 180 to 220 degrees C, in well-stirred baths of NaZ in contact with excess liquid TEA. Current densities are near 10 ma/cm/2/.

Cathode current efficiencies are observed in the range 80 to 105% without apparent correlation with the temperature, current density, or solvent composition although all of these variables strongly effect the quality of the deposit. This is true even for extreme variations of the temperature of 35 to 280 degrees C and a current density of 2 to 100 ma/cm/2/. This proces...