Browse Prior Art Database

Dual Rotation Mask Alignment

IP.com Disclosure Number: IPCOM000095384D
Original Publication Date: 1965-Dec-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Grundon, FR: AUTHOR

Abstract

High accuracy of alignment of one object superimposed on another can be gained. This is realized by using two axes of rotation and positioning with a first and then with a second. When positioning about the second axis the accuracy of the first axis is maintained.

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Dual Rotation Mask Alignment

High accuracy of alignment of one object superimposed on another can be gained. This is realized by using two axes of rotation and positioning with a first and then with a second. When positioning about the second axis the accuracy of the first axis is maintained.

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