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Removal of Copper Impurities from Quartz

IP.com Disclosure Number: IPCOM000095392D
Original Publication Date: 1965-Dec-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Gansauge, P: AUTHOR [+2]

Abstract

In the production of semiconductor components, impurities of copper in the semiconductor material are highly disturbing. This is because such impurities, even in a very small concentration, affect the electric properties of the semiconductor material considerably.

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Removal of Copper Impurities from Quartz

In the production of semiconductor components, impurities of copper in the semiconductor material are highly disturbing. This is because such impurities, even in a very small concentration, affect the electric properties of the semiconductor material considerably.

Most of the production processes, which take place at elevated temperatures, are carried out in quartz ampoules. In such processes, copper impurities become removed from the quartz, which in commercial qualities always contains Cu, and are absorbed by the semi-conductor crystal. For eliminating this copper from the quartz, gallium arsenide is especially effective.

The quartz parts to be purified are placed together with GaAs into a quartz ampoule which is evacuated and sealed. Then the quartz parts are subjected to a heat treatment. This causes the copper to diffuse out of the quartz and to be absorbed by the GaAs acting as a highly efficient getter. Also the Cu content of the ampoule is greatly reduced after the heat treatment.

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