Browse Prior Art Database

Etching Fixture for Small Specimens

IP.com Disclosure Number: IPCOM000095562D
Original Publication Date: 1964-Mar-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Staples, JL: AUTHOR

Abstract

Small specimens such as semiconductor chips are effectively etched without danger of loss, due to floating away. Etching is accomplished by positioning the specimen between porous layers in an etching fixture as shown in the drawing. The porous layers can be glass frit.

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Etching Fixture for Small Specimens

Small specimens such as semiconductor chips are effectively etched without danger of loss, due to floating away. Etching is accomplished by positioning the specimen between porous layers in an etching fixture as shown in the drawing. The porous layers can be glass frit.

The system lends itself not only to etching without loss of small specimens but also to rapid short-term etch and quench operations. Such is by placing layers of etch and quench liquid regions over the upper porous retaining layer and controlling the liquid flow over the specimens by connection of the outlet to a water aspirator device.

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