Browse Prior Art Database

Electron Microscope

IP.com Disclosure Number: IPCOM000095625D
Original Publication Date: 1964-Mar-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 36K

Publishing Venue

IBM

Related People

Schuler, C: AUTHOR

Abstract

The device is an electron microscope. It utilizes a laser beam to excite the surface electrons of a sample being studied to a photoemissive level. Emitted electrons are projected upon an included viewing screen. It is for investigating a wide variety of materials having sufficient conductivity including semiconductors.

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Electron Microscope

The device is an electron microscope. It utilizes a laser beam to excite the surface electrons of a sample being studied to a photoemissive level. Emitted electrons are projected upon an included viewing screen. It is for investigating a wide variety of materials having sufficient conductivity including semiconductors.

The device 1 includes vacuum chamber 2 on which the material sample 4 is fixed by a holding or support device 3. The laser beam 5 is focussed on the spot to be projected. Beam 5 originates at a laser, not shown, arranged outside of the vacuum chamber and is directed towards this material sample 4. Opposite the sample on the inner wall of the chamber 2, a screen 6 is arranged as a registration or image producing device for the photo-electrons emitted from the sample. A voltage source 7 has its positive terminal connected to the screen 6 and its negative terminal to the support member 3.

Source 7 serves to charge the screen positively in relation to the material sample 4. Source 7 also serves to provide an accelerating field for the photo- emitted electrons from sample 4 and causes them to impinge upon screen 6 and form the desired image. The electrons impinging on the screen 6 deliver to it a magnified image of the density distribution of the photo-emission current of the area of the material sample exposed to radiation.

The density variations of the emission current which forms the contrast are an image of the locally varying wo...