Browse Prior Art Database

Four Point Strobe

IP.com Disclosure Number: IPCOM000096266D
Original Publication Date: 1963-Mar-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Kennedy, A: AUTHOR

Abstract

In the making of resistivity measurements in thin film substrates, crystal wafers, etc., it is necessary that minute areas be subjected to test. In order to do this without damage to the component, probes are used that penetrate the surface a slight distance. These probes are located in a straight line and as close together as is operationally possible. This device permits a close arrangement to be realized.

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Four Point Strobe

In the making of resistivity measurements in thin film substrates, crystal wafers, etc., it is necessary that minute areas be subjected to test. In order to do this without damage to the component, probes are used that penetrate the surface a slight distance. These probes are located in a straight line and as close together as is operationally possible. This device permits a close arrangement to be realized.

A head 10 of resinous material is mounted for vertical movement above table
11. This is adjustable along the X and Y axis by micrometer screws 12 and 14. Head 10 has a body portion 16 and a lower plate 17. The abutting faces of these members are stepped so that pairs of contact springs 18 and 20 are located in separate planes. Secured to the spring members by staking, welding, etc., are probes 21. Their ends are pointed to aid in piercing test samples. Probes 21 project beyond the surface of plate 17 approximately. 008 of an inch. Thus, with the head hard down on a sample, no more than that amount of pin pierces the surface.

Probes 21 are approximately.0055 inch tungsten wires and the springs are.010 inch by.050 inch wide of beryllium copper. The springs are so located in cavity 22 that they are permitted to bend upwardly, when forced onto a sample, at a point about. 125 inch from the probe. These dimensions provide a pressure on the probe points of from 400 to 500 grams when the spring is at maximum deflection.

A sample is held on the table...