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Sputtering Cathode for Magnetic Film Deposition

IP.com Disclosure Number: IPCOM000096559D
Original Publication Date: 1963-Jul-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Bertelsen, BI: AUTHOR

Abstract

Thin ferromagnetic films are produced for memory devices by cathode sputtering in the presence of an externally applied field. Since the cathode is ferromagnetic, the permeability of the cathode distorts the externally applied field and adversely affects the skew and dispersion of the resulting film. These adverse affects are overcome with these cathodes.

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Sputtering Cathode for Magnetic Film Deposition

Thin ferromagnetic films are produced for memory devices by cathode sputtering in the presence of an externally applied field.

Since the cathode is ferromagnetic, the permeability of the cathode distorts the externally applied field and adversely affects the skew and dispersion of the resulting film. These adverse affects are overcome with these cathodes.

In the upper drawing, a single nickel-iron ferromagnetic wire is wound in serpentine fashion across the face of the anodized aluminum cooling base. This contains an inlet and an outlet for the passage of water through it. Parallel portions of the wire are closely spaced. This is so that the component of circumferential magnetic field of each parallel portion of wire opposes the component of circumferential field of an adjacent portion. Such is in the plane of the substrate to produce a zero net magnetic field in that plane when current from the low voltage battery, sufficiently large to magnetically saturate the cathode, is passed through the wire.

Once the cathode has reached the magnetic saturation point, its permeability with respect to the applied magnetic field is approximately equal to unity. Therefore, the magnetic lines of force of the applied field are not subject to deviation as a result of the presence of the cathode in the field. The fact that there is no field in the substrate plane associated with the cathode prevents it from having any additive or su...