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Detecting Discontinuities In Thin Insulating Films

IP.com Disclosure Number: IPCOM000096969D
Original Publication Date: 1962-Mar-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

DaSilva, E: AUTHOR [+2]

Abstract

A non-destructive method of examining surfaces of thin insulating films 1 in situ by electron emission microscope techniques is realized. Thin insulating film 1 deposited over thin metal film 2, e. g., a ground plane supported on substrate 3, is scanned by a beam directed from electron gun 4. Thin metal film 2 is electrically continuous via land structure 5 and along lead 6 to signal viewing unit 7, e. g., an oscilloscope. When thin insulating film 1 is scanned, the resultant output signal along lead 6 varies according to the character, e. g., thickness variations, surface structure differences, etc., and condition, e. g., presence of pinholes, etc., of the thin insulating film.

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Detecting Discontinuities In Thin Insulating Films

A non-destructive method of examining surfaces of thin insulating films 1 in situ by electron emission microscope techniques is realized. Thin insulating film 1 deposited over thin metal film 2, e. g., a ground plane supported on substrate 3, is scanned by a beam directed from electron gun 4. Thin metal film 2 is electrically continuous via land structure 5 and along lead 6 to signal viewing unit 7, e. g., an oscilloscope. When thin insulating film 1 is scanned, the resultant output signal along lead 6 varies according to the character, e. g., thickness variations, surface structure differences, etc., and condition, e. g., presence of pinholes, etc., of the thin insulating film.

When the thickness of thin insulating film 1 is very small, the resultant output signal is primarily determined by electron conduction through film 1 to thin metal film 2, which varies inversely as a function of film thickness. As the thickness of the thin insulating film 1 increases, the resultant output signal is primarily determined by secondary electron emission which varies directly as a function of film thickness. The resultant output signal is employed to intensity-modulate the raster pattern of signal viewing unit 8.

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