Browse Prior Art Database

Evaporation Source For Metals

IP.com Disclosure Number: IPCOM000097070D
Original Publication Date: 1962-May-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Priest, J: AUTHOR [+2]

Abstract

Evaporation source 1 comprises an inner screen cylinder 2 positioned within an outer non-perforated cylinder 3, each formed of refractory materials. Inner cylinder 2 rests on bottom 4 of outer cylinder 3. An annular removable cap 5 maintains inner cylinder 2 coaxially disposed within outer cylinder 3. Evaporation source 1 is positioned within an RF induction heater 6.

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Evaporation Source For Metals

Evaporation source 1 comprises an inner screen cylinder 2 positioned within an outer non-perforated cylinder 3, each formed of refractory materials. Inner cylinder 2 rests on bottom 4 of outer cylinder 3. An annular removable cap 5 maintains inner cylinder 2 coaxially disposed within outer cylinder 3. Evaporation source 1 is positioned within an RF induction heater 6.

Evaporant, loaded between inner cylinder 2 and outer cylinder 3, is transformed to a liquid phase on energization of the induction heater 6. The liquid evaporant filters through inner cylinder 2 which retains surface contaminations 7. Evaporation, therefore, is effected from clean surfaces 8 of the evaporant within inner cylinder 2.

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