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Browse Prior Art Database

Continuous Production of Magnetic Films

IP.com Disclosure Number: IPCOM000097420D
Original Publication Date: 1962-Nov-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Mohr, T: AUTHOR

Abstract

Large area thin magnetic films, exhibiting homogeneous magnetic characteristics, are produced in a continuous process in vacuum. The substrate is moved through different process stages at which the deposition of various layers as well as the subsequent annealing processes occur.

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Continuous Production of Magnetic Films

Large area thin magnetic films, exhibiting homogeneous magnetic characteristics, are produced in a continuous process in vacuum. The substrate is moved through different process stages at which the deposition of various layers as well as the subsequent annealing processes occur.

Vaporization takes place through a diaphragm extending perpendicular to the direction of movement of the substrate. To produce particularly wide layers, the crucibles together with the respective diaphragms are moved to and fro synchronously in a direction perpendicular to the direction of movement of the substrate.

A preheated substrate, e. g., silver, moving from right to left is coated with a SiO layer for smoothness purposes in the first stage T1. In the second stage T2, the permalloy layer (Ni Fe 81/19%) is vaporized onto the substrate. The magnetic field H necessary in this stage for inducing the predetermined magnetic anisotropy of the films is applied by a pair of Helmholtz coils. The annealing processes for improving the magnetic properties of the films take place subsequently in the adjacent stages. The magnetic parallel field H = is applied at a high temperature at T3. The magnetic cross field H+ is applied at a lower temperature at T4.

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