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Evaporation Method And Apparatus

IP.com Disclosure Number: IPCOM000097886D
Original Publication Date: 1961-Sep-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 60K

Publishing Venue

IBM

Related People

Da Silva, EM: AUTHOR

Abstract

The evaporation method and apparatus are particularly suited to evaporants of low thermal conductivity.

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Evaporation Method And Apparatus

The evaporation method and apparatus are particularly suited to evaporants of low thermal conductivity.

A heating device 28 contains and heats the evaporant to a temperature slightly below its evaporation temperature. Element 30 produces radiant energy which is radiated to the surface of the evaporant. Its temperature on the upper surface is increased above the evaporation temperature. This results in the charge being evaporated only from a thin surface layer.

The element 30 is in the form of a mesh or screen. It is positioned, intermediate 28 and the substrate 22, to receive a deposit of the evaporated material.

The structure for and method of evaporation prevents spattering or spattered particles from reaching substrate 22.

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