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Method for Producing Uniform Controlled Thin Films

IP.com Disclosure Number: IPCOM000098236D
Original Publication Date: 1960-Jun-01
Included in the Prior Art Database: 2005-Mar-07
Document File: 2 page(s) / 26K

Publishing Venue

IBM

Related People

Caracciolo, EA: AUTHOR

Abstract

A uniformly smooth film can be distributed on objects in a multiple spinning operation where the object being spun spins about its rotational center point and a second rotational center point. This is analogous to the spinning of the earth on its polar axis as it makes its yearly orbit around the sun. This procedure prevents the formation of troughs, resembling the arms of a spiral nebula, which occurs when the object being coated spins only about its center point.

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Method for Producing Uniform Controlled Thin Films

A uniformly smooth film can be distributed on objects in a multiple spinning operation where the object being spun spins about its rotational center point and a second rotational center point. This is analogous to the spinning of the earth on its polar axis as it makes its yearly orbit around the sun. This procedure prevents the formation of troughs, resembling the arms of a spiral nebula, which occurs when the object being coated spins only about its center point.

The spinning procedure is illustrated by use of the apparatus of the above drawing in which discs 1 and 2 are spun around their respective center points 3 and 4 while riding on base 5. Base 5 rotates about center point 6. Discs 1 and 2 may spin in the direction of spin of base 5, as indicated by the arrow on disc 1, or in the opposite direction, as indicated by the arrow on disc 2, at a speed independently controllable from that of base 5.

The film is applied to the discs by pouring the film forming material on the discs at their center points, or by brushing, spraying, etc.

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