Browse Prior Art Database

Vacuum Metallizing With Controlled Planar Sources

IP.com Disclosure Number: IPCOM000098649D
Original Publication Date: 1959-Aug-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 74K

Publishing Venue

IBM

Related People

Dyman, F: AUTHOR [+4]

Abstract

This metallizing process is concerned with quantity production of thin vacuum deposited films by controlling the movement of a continuous series of substrates S, the evaporation temperature of large planar crucibles C, and the unmasked exposure time of the substrates.

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Vacuum Metallizing With Controlled Planar Sources

This metallizing process is concerned with quantity production of thin vacuum deposited films by controlling the movement of a continuous series of substrates S, the evaporation temperature of large planar crucibles C, and the unmasked exposure time of the substrates.

Quality control of film area uniformity and thickness is achieved by structural and electronic controls. The area uniformity of film is maintained by use of a large planar crucible C in conjunction with a smaller mask aperture A. The rate of deposition is controlled by controlling the temperature of the adjustably elevated crucible C. Feedback from an imbedded thermocouple TC to a saturable core reactor SC controls the electrical power input to the tantalum heater wires H in the crucible supported on pointed rails, thus controlling the crucible temperature to a fine degree.

Since the evaporation rate is held constant, the thickness of the films can be controlled by controlling the exposure time. This is accomplished by controlling the speed of the substrate conveyor drive gearing G. The speed is regulated by using the tachometer T output through a magnetic amplifier MA to control the field voltage of the conveyor or drive motor M so that each individual substrate is exposed for the time desired and uniformly so. The exposure time of the entire conveyor CV is determined by use of aperture closing slides SL as governed by a process timer.

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