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Evaporation Boat For Silicon Monoxide

IP.com Disclosure Number: IPCOM000098693D
Original Publication Date: 1959-Oct-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 58K

Publishing Venue

IBM

Related People

Weed, DS: AUTHOR

Abstract

The material 4 to be evaporated is placed in the bottom of evaporation boat 6 shown with a section removed. Cylindrical section 8 is inserted in the boat and rests upon legs 10. Section 8 is provided with a plurality of baffles 12 which are rigidly secured to the sides by welding or riveting. The baffles are secured so that maximum heat conduction occurs between the boat and baffles. A plurality of holes 14 is cut in the baffles so the holes in one baffle do not overlie the ones in a succeeding baffle.

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Evaporation Boat For Silicon Monoxide

The material 4 to be evaporated is placed in the bottom of evaporation boat 6 shown with a section removed. Cylindrical section 8 is inserted in the boat and rests upon legs 10. Section 8 is provided with a plurality of baffles 12 which are rigidly secured to the sides by welding or riveting. The baffles are secured so that maximum heat conduction occurs between the boat and baffles. A plurality of holes 14 is cut in the baffles so the holes in one baffle do not overlie the ones in a succeeding baffle.

An inductance coil 16 is supplied with high frequency or radio frequency current to produce inductive heating of the boat 6, section 8 and baffles 12. This heating raises the temperature of the boat, the cylinders and the baffles to or above the evaporation temperature of the material 4. The vapor rises in the boat 6, passes through the holes 14 and is deposited on a substrate which is not shown. The heating heats the boat, cylinder

and baffles substantially uniformly and, as all surfaces are at or above the evaporation temperature of the material 4, no evaporent condenses on any surface and the material leaving the boat is in the.form of a vapor. There is no cold zone where the evaporent may condense and eventually flake off.

The arrangement of the baffles and the holes provides a tortuous path through which the vapor must pass before emerging from the boat. The vapor must change direction several times insuring that few solid...