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R-F Induction Heated SiO Furnace

IP.com Disclosure Number: IPCOM000098961D
Original Publication Date: 1962-Mar-01
Included in the Prior Art Database: 2005-Mar-08
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Hand, FR: AUTHOR

Abstract

Evaporation source 1 (A) comprises inner perforated cylinder 2 positioned within outer non-perforated cylinder 3. Each is formed of tantalum or other refractory metals. Cylinders 2 and 3 are split and joined together by tantalum walls 4. Split, annular bottom 5 is permanently attached along the lower edges of cylinders 2 and 3 to form a container into which evaporant material is placed. Also, split, annular top 6 is tackwelded along upper edges of cylinders 2 and 3. The resultant source is positioned within an R-F induction heater 7.

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R-F Induction Heated SiO Furnace

Evaporation source 1 (A) comprises inner perforated cylinder 2 positioned within outer non-perforated cylinder 3. Each is formed of tantalum or other refractory metals. Cylinders 2 and 3 are split and joined together by tantalum walls 4. Split, annular bottom 5 is permanently attached along the lower edges of cylinders 2 and 3 to form a container into which evaporant material is placed. Also, split, annular top 6 is tackwelded along upper edges of cylinders 2 and 3. The resultant source is positioned within an R-F induction heater 7.

Current flow induced within the walls of cylinders 2 and 3 is shown in current diagram B. As the interior walls of cylinders 2 and 3 experience the same magnitude of eddy currents, they heat uniformly. Evaporant passes through perforations of inner cylinder 2 and rises upwardly through the chimney like structure to be deposited onto substrate, not shown.

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