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Browse Prior Art Database

Structure and Method for Making Air Bridge Wiring

IP.com Disclosure Number: IPCOM000099160D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-14
Document File: 2 page(s) / 57K

Publishing Venue

IBM

Related People

Cronin, JE: AUTHOR [+3]

Abstract

By using a material which may be volatilized at temperature, e.g., parylene, as a temporary metal line and as a mandrel for permanent edge supports, of the low dielectric constant of air between the line and substrate is realized. Extension of the to support an insulating layer provides the to make of air bridge wiring while maintaining planarity good photo resolution at each level.

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This is the abbreviated version, containing approximately 75% of the total text.

Structure and Method for Making Air Bridge Wiring

       By using a material which may be volatilized at
temperature, e.g., parylene, as a temporary metal line and as a
mandrel for permanent edge supports, of the low dielectric constant
of air between the line and substrate is realized.  Extension of the
to support an insulating layer provides the to make of air bridge
wiring while maintaining planarity good photo resolution at each
level.

      Referring to Fig. 1, parylene 10 is deposited on 12. By usual
means, a contact hole to substrate 12 opened at position A and the
shape of a conductive line defined at position B.  A conductor is
then conformally followed by planarization, thus creating pattern 14,
as shown.

      Next, plasma etching is used to remove exposed parylene and to
undercut support of conductive line 18, as shown Fig. 2.  A good
insulator is then deposited conformally anisotropically etched to
form supports 20.  Vent holes shown) are then opened periodically in
metal 18 to ingress of oxygen and escape of carbon and oxygen
products when heated.  All of parylene 10 is in the heating process,
leaving metal line 18 on 20 and air under line 18.  Vent holes may be
filled conformal deposition of a conductor.  Thus, a single of air
bridge metal lines can be formed.  By deferring opening of vent holes
and heating in oxygen, the process results in planarization and
continuation air bridge conductor construction to additional levels.

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