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Vertically Emitting Diode Laser Integrated Front-Beam Monitor

IP.com Disclosure Number: IPCOM000099186D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-14
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Buchmann, P: AUTHOR [+3]

Abstract

Proposed is a diode laser with integrated monitor photodiode. The photodiode has the side the laser etched at an angle of 45 degrees, the facet being covered with a highly reflecting coating. of the beam power is emitted vertically with respect to wafer surface making the structure suitable for 2- laser array applications.

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Vertically Emitting Diode Laser Integrated Front-Beam Monitor

       Proposed is a diode laser with integrated monitor
photodiode.  The photodiode has the side the laser etched at an angle
of 45 degrees, the facet being covered with a highly reflecting
coating. of the beam power is emitted vertically with respect to
wafer surface making the structure suitable for 2- laser array
applications.

      The figure shows the structure in a longitudinal  The A1GaAs
laser diode has vertically etched and back mirrors.  In front of the
laser is the which has the side facing the laser etched at an of 45
degrees.  The vertical and the 45- degree can be done using
directional ion beam techniques by tilting of the wafer relative to
the ion beam in 2-step process.

      The tilted facet of the photodiode is coated with a layer COAT
having a reflectivity in the order of for 45-degree incidence.
Therefore, about 90% of the facet output power of the laser diode is
emitted to the surface of the wafer.

      The residual 10% of the transmitted beam power is at the
dielectric layer/A1GaAs interface of the diode.  This refracted beam
propagates, as shown in the figure, into the monitor photodiode it is
absorbed partially in the layer which forms the region in the laser
diode. By reverse-biasing of the a photocurrent Ipd is generated
which is to the power of the vertical optical beam. a direct
monitoring of the optical power output is with an integrated
photodiode.