Browse Prior Art Database

Device for Separating Ozone From Oxygen

IP.com Disclosure Number: IPCOM000099337D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-14
Document File: 1 page(s) / 53K

Publishing Venue

IBM

Related People

Brady, MJ: AUTHOR [+2]

Abstract

Disclosed is a device for separating ozone from oxygen to provide a strong oxidizing gas to form metal oxides.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 57% of the total text.

Device for Separating Ozone From Oxygen

       Disclosed is a device for separating ozone from oxygen to
provide a strong oxidizing gas to form metal oxides.

      In reactive sputter deposition of metals to form oxides (*),
the metal is sputtered from a metal target onto a substrate.  The
sputter gas mixture is usually argon and oxygen.  At the substrate
the metal and the oxygen react to form a metal oxide if there is
sufficient oxygen.  If there is not enough oxygen the film that forms
will contain a metal oxide which is rich in metal.  If the oxygen
concentrations is too high at the target it will oxidize, and the
sputter rate will decrease markedly.

      The device disclosed provides for a high concentration of
active oxygen in the vicinity of the substrate and low in the
vicinity of the target, and also allows higher flow rates of an
oxidizing gas to form a metal oxide at the substrate, while limiting
the oxidation of the target, thus providing better control of the
process chamber background pressure.  Molecular oxygen is supplied to
an ozone generator to form ozone, which is a strong oxidizing agent.
The output of the ozone generator contains both molecular oxygen and
ozone.  Positive pressure forces the gaseous mixture to pass through
an inhomogeneous magnet field produced by magnetic pole pieces.  The
gases have magnetic moments, and thus will experience a force in a
magnetic field gradient.  The susceptibility of molecular oxygen is
500 tim...