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Multifunction Non-Contact Stylus Microscope

IP.com Disclosure Number: IPCOM000099343D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-14
Document File: 2 page(s) / 70K

Publishing Venue

IBM

Related People

Pohl, DW: AUTHOR

Abstract

"Scanning 'X' Microscope" (SXM) is a short name for the family of novel non-contact stylus microscopes derived from and including the Scanning Tunneling Microscope (STM). The outstanding resolution and topographic capabilities of these microscopes are of great interest for research purposes and industrial applications.

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Multifunction Non-Contact Stylus Microscope

       "Scanning 'X' Microscope" (SXM) is a short name for the
family of novel non-contact stylus microscopes derived from and
including the Scanning Tunneling Microscope (STM).  The outstanding
resolution and topographic capabilities of these microscopes are of
great interest for research purposes and industrial applications.

      The power of these microscopes can be enhanced by combining the
various modes of operation within one instrument.  We describe a
simple way to combine the force and capacitance modes with the option
to include tunneling as a third mode.  The basic scheme consists of -
  a mechanically oscillating probe tip on a resonating cantilever
beam (CB) or equivalent mechanical oscillator whose resonance
frequency is a measure of the interfacial force gradient; -   an
electrical oscillator with the tip as a capacitive element whose
resonance frequency is a measure of the interfacial capacitance
gradient.

      An embodiment is shown schematically in the figure.
Essentially, it consists of a scanning capacitance microscope (SCM)
as known from Kleinknecht et al., Beitr . Elektronenmikr . Direktabb
. Oberfl . 21, 19 (1988), with the exception that the probe tip 1 is
mounted on a CB 2 like in a scanning force microscope (SFM). In the
figure, the CB 2 is shown as a bent wire ending in a pointed tip
1. The natural frequency of CB 2 determines the resonance frequency
of the oscillator 3 by means of...