Browse Prior Art Database

Automatic Alignment Fixture for Substrate Micro-milling Operations

IP.com Disclosure Number: IPCOM000099403D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-14
Document File: 2 page(s) / 72K

Publishing Venue

IBM

Related People

Chu, KL: AUTHOR [+2]

Abstract

A mechanism is described whereby a motor-driven fixture provides automatic "best-fit" alignment for micro-milling the thin film layers on the top of a substrate. The mechanism enables the top reference surface of substrates to be located within an accuracy of one micron.

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Automatic Alignment Fixture for Substrate Micro-milling Operations

       A mechanism is described whereby a motor-driven fixture
provides automatic "best-fit" alignment for micro-milling the thin
film layers on the top of a substrate.  The mechanism enables the top
reference surface of substrates to be located within an accuracy of
one micron.

      The mechanism of this disclosure is shown in a front view,
partly in section, in the drawing.  Thin film substrate 10, as shown
in the drawing, is loaded and held by vacuum chuck 11 while chuck
assembly 12 is moved along the X and Y axis.  Four electronic gages
13 are equipped with measuring probes 14.  Initially, probes 14 are
lowered very lightly onto the four corners of substrate 10.  Four
linear stepping motors 15, equipped with spherical end jacks 16, push
gimbal 17 at the four corners independently.  Gimbal 17 is held
securely in place against four jacks 16 by means of four vertical
springs 18.  Horizontally, three springs (not shown) are used to
position gimbal 17 against three rest buttons 19.  Since the cutting
force exerted on substrate 10 is small during the milling operation,
more than enough force is provided by these springs to hold the
substrate securely in place.  Since the center lines of jacks 16 and
probes 14 are on the same centers, pushing gimbal 17 will provide a
direct movement on the top corners of substrate 10.  Reference points
are calibrated by each of the four electronic gages 13...