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Spinner Cup And Adhesive Frame for Uniformly Spin Coating Non-Circular Substrates

IP.com Disclosure Number: IPCOM000099514D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 70K

Publishing Venue

IBM

Related People

Kienle, G: AUTHOR [+3]

Abstract

The described spinner cup prevents spun off coating material from dropping back onto the non-circular substrate. An about 50 mm thick adhesive frame bridges the gap between the square substrate and the circular spinner cup, thus providing an extended auxiliary surface for the coating material.

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This is the abbreviated version, containing approximately 64% of the total text.

Spinner Cup And Adhesive Frame for Uniformly Spin Coating Non-Circular Substrates

       The described spinner cup prevents spun off coating
material from dropping back onto the non-circular substrate.  An
about 50 mm thick adhesive frame bridges the gap between the square
substrate and the circular spinner cup, thus providing an extended
auxiliary surface for the coating material.

      Known vacuum holding means (chucks) for the coating spindle
afford uniform coating only within a circle touching the four outer
edges of the substrates.  The layer thickness at the four corners is
up to 40% higher than in the substrate center.  As the excess coating
material is radially spun off the substrate center towards the
outside, the respective adjoining substrate edge collects part of
this material from where it has to be removed.

      The rectangular substrate along with its holder acts like a
propeller.  The eddy air inside the spinner cup causes part of the
spun off material to be converted to a solid by solvent evaporation.
In practice this solid takes the form of microfine spin threads which
heavily contaminate the substrate and necessitate frequent cleaning
of the machine.

      Photolithographic processes and reactive ion etching call for
absolutely uniform coating.  The outer edges of the substrates must
not be contaminated by the coating material either, as this would
lead to heavy particle contamination. In addition, any edge coating,
even if occu...