Browse Prior Art Database

Wafer Handling Robotic End-of-Arm Tool for Operation in Clean Room Environments

IP.com Disclosure Number: IPCOM000099579D
Original Publication Date: 1990-Feb-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Lisanke, MG: AUTHOR [+3]

Abstract

A robotic end-of-arm tool is described which can be used with an anthropomorphic type of robot so as to randomly access and manipulate wafers, as used in the fabrication of integrated circuitry. The tool is designed to operate in a "Class 10" clean room environment. The tool is unique in that both a wafer and a wafer carrier can be manipulated with only one mechanical device.

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Wafer Handling Robotic End-of-Arm Tool for Operation in Clean Room Environments

       A robotic end-of-arm tool is described which can be used
with an anthropomorphic type of robot so as to randomly access and
manipulate wafers, as used in the fabrication of integrated
circuitry.  The tool is designed to operate in a "Class 10" clean
room environment.  The tool is unique in that both a wafer and a
wafer carrier can be manipulated with only one mechanical device.

      The end-of-arm tool is designed to be a multi-gripper type of
device so as to perform two tasks.  The first task manipulates the
wafer carrier while the second task provides the ability to randomly
access wafers, which are stored in wafer cassettes, manipulating them
through various work stations within a work cell.

      Fig. 1 is a top view and Fig. 2 is a side view of
the tool which is designed to be attached at the end of a robot arm,
for use in clean room environments.  The tool incorporates vacuum
connector 10, electrical sensing unit 11, and actuating mechanisms
12, which are conducive to this class of environment.  Materials used
are hard-coated aluminum side fingers 13, which are equipped with
DELRIN* pads 14 to prevent particle production from oxidation and
rubbing.  Vacuum finger 15 is also made of delrin to prevent
particles from sticking to its surfaces and to provide flexibility.
The finger is approximately 0.090" thick and is designed to enable
the finger to access individu...