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Sputtered Nichrome (nicrox) As an ABS Protection Layer During RIE Process of Thin Film Recording Heads

IP.com Disclosure Number: IPCOM000099670D
Original Publication Date: 1990-Feb-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 1 page(s) / 21K

Publishing Venue

IBM

Related People

Howard, JK: AUTHOR [+4]

Abstract

Reactive ion etching (RIE) has become a viable tool for making complicated air bearing surfaces (ABS) on sliders of thin film heads. Corrosion of the delicate head structure, which consists of several metallic thin films, is a serious problem. Among various candidates, sputtered NiCrOx of 1000 to 2000 angstrom thickness revealed excellent corrosion protection for these thin metallic films as determined by electrochemical measurements. NiCrOx has the advantage, compared to other candidates, that it can be wet chemically removed without damaging the thin film head metallurgy.

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Sputtered Nichrome (nicrox) As an ABS Protection Layer During RIE Process of Thin Film Recording Heads

       Reactive ion etching (RIE) has become a viable tool for
making complicated air bearing surfaces (ABS) on sliders of thin film
heads.  Corrosion of the delicate head structure, which consists of
several metallic thin films, is a serious problem.  Among various
candidates, sputtered NiCrOx of 1000 to 2000 angstrom thickness
revealed excellent corrosion protection for these thin metallic films
as determined by electrochemical measurements.  NiCrOx has the
advantage, compared to other candidates, that it can be wet
chemically removed without damaging the thin film head metallurgy.