Browse Prior Art Database

Repeatable Registration And Sealless Vacuum Contact System

IP.com Disclosure Number: IPCOM000099760D
Original Publication Date: 1990-Feb-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 77K

Publishing Venue

IBM

Related People

Crimi, JS: AUTHOR [+6]

Abstract

An apparatus for achieving simultaneous two-sided exposure of a mask is shown in the figures.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 65% of the total text.

Repeatable Registration And Sealless Vacuum Contact System

       An apparatus for achieving simultaneous two-sided
exposure of a mask is shown in the figures.

      In Fig. 1, the overall arrangement of the apparatus is shown.

      Fig. 2 shows a detailed view of a cone and ball-alignment
fixture.  The top frame 1 holds the top photoplate 3, and the bottom
frame 2 holds the bottom photoplate 4 (not shown).  The cone 9
recessed in each corner of the bottom frame prevents any lateral
movement, while the spring 13 at the bottom of each cone 9 allows the
cone 9 to move in a vertical direction to compensate for varying
substrate thicknesses.  Alignment of the two photoplates 3, 4 is
accomplished by adjustment of the ball assembly 7 located in each
corner of the top frame 1.  When the lock nuts 11 are loosened, the
ball assemblies 7 are allowed to move in a lateral direction, but not
vertically.  The top frame 1 is placed on top of the bottom frame 2
with the ball assemblies 7 seated in the cones.  The lock nuts 11 are
loosened, and the top frame 1 is adjusted with respect to the bottom
frame 2 until registration is achieved.  The four lock nuts 11 are
then tightened to lock the ball assemblies 7 in place.  Once
registration is achieved and the ball assemblies 7 locked, the two
frames 1, 2 can be separated and rejoined repeatedly without
disturbing alignment.

      As shown in Fig. 3, the necessary contact between photoplates
3, 4 and metal mask 5 is...