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Vacuum Lamination of Photoresist On a Continuous Web

IP.com Disclosure Number: IPCOM000099777D
Original Publication Date: 1990-Feb-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Marconi, F: AUTHOR [+2]

Abstract

Disclosed is a system which vacuum laminates dry-film photoresist on a continuous web. A vacuum process is necessary to prevent air from being trapped on the product as the resist conforms over film topography. Current vacuum lamination techniques are available for detached panels, but special considerations must be made to laminate continuous rolls of material.

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Vacuum Lamination of Photoresist On a Continuous Web

       Disclosed is a system which vacuum laminates dry-film
photoresist on a continuous web.  A vacuum process is necessary to
prevent air from being trapped on the product as the resist conforms
over film topography.  Current vacuum lamination techniques are
available for detached panels, but special considerations must be
made to laminate continuous rolls of material.

      Vacuum lamination of panels requires placing a panel between
two platens and evacuating the space between them. The photoresist is
then forced onto the panel surface without the presence of air.  A
similar process can be done with a continuous web in a
step-and-repeat fashion, but this necessitates a "dead band" area of
overlap where the platens contact the film.  This loss of active area
is not practical and requires special product design and registration
techniques.

      This article describes a hot roll lamination technique whereby
the entire laminating system is within a vacuum chamber.  In the
figure, thin film material 9 is unwound from supply reel 1 and
tensioned around idler rolls 2.  It then passes through preheat rolls
3 to raise the film temperature prior to entering lamination rolls 4,
which are heated internally.  Dry film photoresist is deposited on
the material 9 from the resist reels 5 as resist and thin film are
pressed together by the lamination rolls 4.  The product 10, now
laminated on both sides, travels...