Browse Prior Art Database

X, Y, Z Robotic E-beam Table Sensing Unit

IP.com Disclosure Number: IPCOM000099904D
Original Publication Date: 1990-Feb-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Lisanke, MG: AUTHOR [+3]

Abstract

This article describes a means in a robotic system for the robot to accurately place a wafer carrier into an independent work station location by using an X, Y, Z sensing unit and relaying this information to the robot prior to carrier placement in the work station location.

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This is the abbreviated version, containing approximately 80% of the total text.

X, Y, Z Robotic E-beam Table Sensing Unit

       This article describes a means in a robotic system for
the robot to accurately place a wafer carrier into an independent
work station location by using an X, Y, Z sensing unit and relaying
this information to the robot prior to carrier placement in the work
station location.

      By using linear potentiometer position sensing units, table
movement and elevator (not shown) location can be sensed.  A targeted
wafer carrier placement area can be pin-pointed and this analog
information relayed to the robot.  The linear potentiometers can
sense and pin-point movement in the X, Y, Z directions within a range
of 1.000" with an accuracy of .003".  An accuracy of .010"
is required for the robot to accurately place the carrier into the
elevator.  At assembly, the potentiometers are set up at the
mechanical mid-stroke position, which will then allow  1.000"
motion in the X, Y, and Z axes.

      The sensing unit disclosed herein is shown in the drawing in
isometric view.  Potentiometers 1, 2 and 3 are mounted to a fixture 4
on top of the robot floating table (not shown).  They are arranged in
an X, Y, Z direction in relation to the center of the elevator (not
shown).  There is a hardened rectangular block 5 mounted on top of
the floating table which makes contact with the stationary
potentiometers 1, 2 and 3.  The table floats and causes potentiometer
spring-loaded rods 6, 7 and 8 to move back and forth.  The
po...